Title: Compact Nano-Electro-Mechanical Non-Volatile Memory (NEMory)
for 3D Integration

Woo Young Choi
(Professors Tsu-Jae King Liu)

A new electro-mechanical non-volatile memory (NVM) cell
design is proposed and demonstrated for the first time. The
fabricated cells operate with relatively low program/erase
voltages and large sensing margin. Because only dielectric
and metal layers are required, this cell design is suitable for
post-CMOS fabrication. As the cell area is reduced, low
operating voltages can be maintained by scaling the vertical
dimensions of the cell. Nanometer-scale electro-mechanical
memory technology is therefore attractive for high-density
embedded memory applications.
Email contact: wychoi@eecs